Sapphire’s high purity and strength is an excellent and industry accepted material for Semiconductor manufacturing.  Its durability and scratch resistance make Sapphire ideal for vacuum environments and high plasma resistance to withstand etching.

Sapphire, which is a crystalline form of aluminum oxide (Al2O3), has a number of unique physical and chemical properties that make it well-suited for use in the semiconductor industry. Some of the key benefits of sapphire in semiconductor manufacturing include its high thermal conductivity, excellent optical transmission properties, and exceptional resistance to mechanical and chemical damage.

One of the most common applications of sapphire in the semiconductor industry is as a substrate material for the growth of epitaxial films. Epitaxy refers to the process of depositing a thin layer of semiconductor material onto a substrate, such as sapphire, in order to create a crystalline structure that is identical to that of the substrate. This process is critical for the production of high-quality semiconductor devices, as it enables the precise control of the electronic properties of the materials being used.

In addition to its use as a substrate material, sapphire is also used as a component in a wide range of semiconductor manufacturing processes. For example, sapphire is commonly used as a wafer carrier in the production of silicon wafers, as its high strength and scratch resistance make it an ideal material for handling and transporting fragile silicon wafers. Sapphire is also used as a window material in a variety of semiconductor processing tools, such as plasma etchers and ion implanters, as its high plasma resistance and scratch resistance enable it to withstand the harsh conditions of these processes.

Overall, the unique properties of sapphire make it an excellent material for a wide range of semiconductor manufacturing applications. Its high purity, strength, durability, and resistance to damage make it an ideal substrate material for epitaxial growth, as well as a valuable component in a variety of processing tools and equipment.


Major products includes:

Plasma containment tubes
>330mm large components
Viewports
End effectors
Lift pins
Edge rings
Showerheads
E-chucks

Typical Applications:

Sapphire Window and Viewports – good transmission in Visible & IR Wavelength and excellent life span. UV Grade available.

Sapphire Lift Pins – replacing Quartz with less wear, excellent heat and plasma resistance.

Sapphire Balls – precision roundness and excellent wear for plates/wafer support

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