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2 Inch 100um Thickness DSP 0.1mm Sapphire Substrate(Wafer)
Material: KY Sapphire Al2O3 single crystal without bubble
Orientation:C-cut,M-axis off 0.0+/-0.2°
Diameter: 50.8 +/-0.2mm ;
Thickness:100 ± 15 um ;
Flatness:16.0 +/- 1.0 mm
Orientation: a-axis
Surface: SSP /dsp Epi-ready Polished ;
TTV<= 10um
BOW<= 20um ;
Warp<= 20 um ;
Front Surface Roughness: (Ra) Ra <= 0.3 nm ; or double side
Back Surface Roughness: (Ra) Ra <0.3nm
Edge: from 1mm